Photo acid generators
WPAG
Semiconductor manufacturing
Our photo acid generator product line has proven quality and performance for excimer resist applications with industry leading resist manufactures. Besides the products listed below, We are developing diazodisulfones and triphenylsulfonium salts. Also, we sell diphenyliodonium compounds which are used as optical cationic initiators (WPI series). We can supply products of varied grades from high grade to multipurpose grade. We also provide custom synthesis of PAGs.
WPAG-145
(Bis(cyclohexylsulfonyl)diazomethane))
For photoresist for manufacturing semiconductor device, etc.
CAS RN® | 138529-81-4 |
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Molecular weight | 334.45 |
Physicality
Color Appearance |
white - light yellow crystals or crystalline powder |
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Melting point | 130.1-130.6℃ |
Solubilities | water, ethanol, hexane : practically insoluble. acetone, ethyl acetate : freely soluble . |
Related laws and regulations
TSCA | Not Listed |
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EINECS | Not Listed |
REACH | Not Listed |
WPAG-170
(Bis(tert-butylsulfonyl)diazomethane)
For photoresist for manufacturing semiconductor device, etc.
CAS RN® | 138529-84-7 |
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Molecular weight | 282.38 |
Physicality
Color Appearance |
slightly yellow - yellow crystalline powder |
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Melting point | 121℃ |
Solubilities | water, methanol : practically insoluble. chloroform, acetone, acetonitrile : freely soluble. |
Related laws and regulations
TSCA | Not Listed |
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EINECS | Not Listed |
REACH | Not Listed |
WPAG-199
(Bis(4-methylphenylsulfonyl)diazomehtane)
For photoresist for manufacturing semiconductor device, etc.
CAS RN® | 14159-45-6 |
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Molecular weight | 350.41 |
Physicality
Color Appearance |
light yellow - yellow crystals or crystalline powder |
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Melting point | 121.4-122.4℃ |
Solubilities | water, ethanol, hexane : practically insoluble. acetone, ethyl acetate : slightly freely soluble. |
Related laws and regulations
TSCA | Not Listed |
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EINECS | Not Listed |
REACH | Not Listed |
WPAG-367
(Diphenyl-2,4,6-trimethylphenylsulfonium p-toluenesulfonate)
For photoresist for manufacturing semiconductor device, etc.
CAS RN® | 347841-51-4 |
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Molecular weight | 476.66 |
Physicality
Color Appearance |
white crystals or crystalline powder |
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Melting point | 112 - 113℃ |
Solubilities | water, methanol, acetone, methylene chloride : soluble. |
Related laws and regulations
TSCA | Not Listed |
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EINECS | Not Listed |
REACH | Not Listed |
Contact us for more details.
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