Electronics materials

Photo acid generators (WPAG series)

Diazodisulfones Triphenylsulfonium salts

Semiconductor manufacturing

Our photo acid generator product line has proven quality and performance for excimer resist applications with industry leading resist manufactures. Besides the products listed below, We are developing diazodisulfones and triphenylsulfonium salts. Also, we sell diphenyliodonium compounds which are used as optical cationic initiators (WPI series). We can supply products of varied grades from high grade to multipurpose grade. We also provide custom synthesis of PAGs.

WPAG-145

(Bis(cyclohexylsulfonyl)diazomethane))

For photoresist for manufacturing semiconductor device, etc.

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CAS RN® 138529-81-4
Molecular weight 334.45

Physicality

Color
Appearance
white - light yellow
crystals or crystalline powder
Melting point 130.1-130.6℃
Solubilities water, ethanol, hexane : practically insoluble.
acetone, ethyl acetate : freely soluble .

Related laws and regulations

TSCA Not Listed
EINECS Not Listed
REACH Not Listed

WPAG-170

(Bis(tert-butylsulfonyl)diazomethane)

For photoresist for manufacturing semiconductor device, etc.

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CAS RN® 138529-84-7
Molecular weight 282.38

Physicality

Color
Appearance
slightly yellow - yellow
crystalline powder
Melting point 121℃
Solubilities water, methanol : practically insoluble.
chloroform, acetone, acetonitrile : freely soluble.

Related laws and regulations

TSCA Not Listed
EINECS Not Listed
REACH Not Listed

WPAG-199

(Bis(4-methylphenylsulfonyl)diazomehtane)

For photoresist for manufacturing semiconductor device, etc.

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CAS RN® 14159-45-6
Molecular weight 350.41

Physicality

Color
Appearance
light yellow - yellow
crystals or crystalline powder
Melting point 121.4-122.4℃
Solubilities water, ethanol, hexane : practically insoluble.
acetone, ethyl acetate : slightly freely soluble.

Related laws and regulations

TSCA Not Listed
EINECS Not Listed
REACH Not Listed

WPAG-336

(Diphenyl-4-methylphenylsulfonium trifluoromethanesulfonate)

For photoresist for manufacturing semiconductor device, etc.

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CAS RN® 81416-37-7
Molecular weight 426.47

Physicality

Color
Appearance
white
crystals
Melting point 102℃
Solubilities water : insoluble.
acetone, PGMEA (1-methoxy-2-propyl acetate) : soluble.

Related laws and regulations

TSCA Not Listed
EINECS Not Listed
REACH Not Listed

WPAG-367

(Diphenyl-2,4,6-trimethylphenylsulfonium p-toluenesulfonate)

For photoresist for manufacturing semiconductor device, etc.

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CAS RN® 347841-51-4
Molecular weight 476.66

Physicality

Color
Appearance
white
crystals or crystalline powder
Melting point 112 - 113℃
Solubilities water, methanol, acetone, methylene chloride : soluble.

Related laws and regulations

TSCA Not Listed
EINECS Not Listed
REACH Not Listed